1. Varadan, V. K., Jiang, X. and Varadan, V. V., “Microstereolithography and Other Fabrication Techniques for 3D MEMS,” John Wiley & Sons, pp. 103–138, 2001.
2. Ali, M. Y., Hung, W. and Yongqi, F., “A Review of Focused Ion Beam Sputtering,” Int. J. Precis. Eng. Manuf., Vol. 11, No. 1, pp. 157–170, 2010.
3. Kajihara, Y., Takeuchi, T., Takahashi, S. and Takamasu, K., “Development of an In-process Confocal Positioning System for Nanostereolithography Using Evanescent Light,” Int. J. Precis. Eng. Manuf., Vol. 9, No. 3, pp. 51–54, 2008.
4. Istiyanto, J., Ko, T. J. and Yoon, I.-C., “A study on copper micromachining using microorganisms,” Int. J. Precis. Eng. Manuf., Vol. 11, No. 5, pp. 659–664, 2010.
5. Im, H., Oh, K. H., Kim, S. G. and Jeong, S., “Application of etchant jet for laser micromachining of metal channels,” Int. J. Precis. Eng. Manuf., Vol. 10, No. 4, pp. 101–105, 2009.