Dual Optical Measurement Probe System for Double-Sided Film Structure
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Link
https://link.springer.com/content/pdf/10.1007/s12541-022-00690-7.pdf
Reference23 articles.
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3. Hlubina, P., Luňáček, J., Ciprian, D., & Chlebus, R. (2008). Spectral interferometry and reflectometry used to measure thin films. Applied Physics B: Lasers and Optics, 92, 203–207.
4. Ghim, Y. S., Rhee, H. G., & Davies, A. (2017). Simultaneous measurements of top surface and its underlying film surfaces in multilayer film structure. Scientific Reports, 7, 11843.
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