Fuzzy Adaptive Sliding Mode Control for the Precision Position of Piezo-Actuated Nano Positioning Stage
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Link
http://link.springer.com/content/pdf/10.1007/s12541-018-0171-3.pdf
Reference29 articles.
1. Gu, G.-Y., Zhu, L.-M., Su, C.-Y., Ding, H., and Fatikow, S., “Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey,” IEEE Transactions on Automation Science and Engineering, Vol. 13, No. 1, pp. 313–332, 2016.
2. Zhu, W., Yang, F., and Rui, X., “Robust independent Modal Space Control of a Coupled Nano-Positioning Piezo-Stage,” Mechanical Systems and Signal Processing, Vol. 106, pp. 466–478, 2018.
3. Tang, H. and Li, Y., “Design, Analysis, and Test of a Novel 2-DOF Nanopositioning System Driven by Dual Mode,” IEEE Transactions on Robotics, Vol. 29, No. 3, pp. 650–662, 2013.
4. Wang, F., Liang, C., Tian, Y., Zhao, X., and Zhang, D., “Design of a Piezoelectric-Actuated Microgripper with a Three-Stage Flexure-Based Amplification,” IEEE/ASME Transactions on Mechatronics, Vol. 20, No. 5, pp. 2205–2213, 2015.
5. Yong, Y. K., Fleming, A. J., and Moheimani, S., “A Novel Piezoelectric Strain Sensor for Simultaneous Damping and Tracking Control of a High-Speed Nanopositioner,” IEEE/ASME Transactions on Mechatronics, Vol. 18, No. 3, pp. 1113–1121, 2013.
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