Author:
Nguyen Duc Canh,Ahn Hyeong Joon
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference10 articles.
1. ASML, “TWINSCAN NXT: 1960Bi,” http://www.asml.com/asml/show.do?lang=EN&ctx=46772&dfp_product_id=7414 (Accessed 7 OCT 2014)
2. Singhose, W., “Command Shaping for Flexible Systems: A Review of the First 50 Years,” Int. J. Precis. Eng. Manuf., Vol. 10, No. 4, pp. 153–168, 2009.
3. Iwasaki, M., Seki, K., and Maeda, Y., “High-Precision Motion Control Techniques: A Promising Approach to Improving Motion Performance,” IEEE Industrial Electronics Magazine, Vol. 6, No. 1, pp. 32–40, 2012.
4. Arakelian, V. H. and Smith, M., “Shaking Force and Shaking Moment Balancing of Mechanisms: A Historical Review with New Examples,” Journal of Mechanical Design, Vol. 127, No. 2, pp. 334–339, 2005.
5. Greene, P. M., Hero, S., and Bittner, D., “Reaction Force Transfer System,” US Patent, No. 6844635B2, 2005.
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