Determination of film thickness and surface profile using reflectometry and spectrally resolved phase shifting interferometry

Author:

Debnath Sanjit Kumar,You Joonho,Kim Seung-Woo

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Reference21 articles.

1. Kim, S.-W. and Kim, G. H., “Thickness profile measurement of transparent thin-film layers by white-light scanning interferometry,” Appl. Opt., Vol. 38, No. 28, pp. 5968–5973, 1999.

2. Yoo, H.-K., Lee, S.-W., Kang, D.-K., Kim, T.-J., Gweon, D.-G., Lee, S.-W. and Kim, K.-S., “Confocal Scanning Microscopy: a High-Resolution Nondestructive Surface Profiler,” IJPEM, Vol. 7, No. 4, pp. 3–7, 2006.

3. Kim, S.-H., Lee, S.-W., Kim, D.-H., Lee, A.-S., Lim, S.-J. and Park, K.-T., “Geometric Accuracy Measurement of Machined Surface Using the OMM (On the Machine Measurement) System,” IJPEM, Vol. 4, No. 4, pp. 57–63, 2003.

4. Gao, W., “Precision Nanometrology and its Applications to Precision Nanosystems,” IJPEM, Vol. 6, No. 4, pp. 14–20, 2005.

5. Dresel, T., Häusler, G. and Venzke, H., “Three-dimensionalsensing of rough surfaces by coherence radar,” Appl. Opt., Vol. 31, No. 7, pp. 919–925, 1992.

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