Author:
Yamada Keiji,Onishi Nobuyuki,Sekiya Katsuhiko,Yamane Yasuo
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering
Reference15 articles.
1. Czichos, H., “Tribology: a systems approach to the science and technology of friction, lubrication, and wear,” Elsevier Sci., Amsterdam, 1978.
2. Jones, M. H. and Scott, D., “Industrial Tribology: The Practical Aspects of Friction, Lubrication and Wear,” Elsevier Sci., Amsterdam, 1983.
3. Ro, S. K. and Park, J. K., “A Compact Ultra-precision Air Bearing Stage with 3-DOF Planar Motions Using Electromagnetic Motors,” Int. J. Precis. Eng. Manuf., Vol. 12, No. 1, pp. 115–119, 2011.
4. Lee, K. W., Noh, Y. J., Gao, W., Arai, Y., Shimizu, Y., Tanaka, K., Fukuta, M., and Kai, Y., “Experimental Investigation of an Airbearing Displacement Sensor for On-machine Surface Form Measurement of Micro-structures,” Int. J. Precis. Eng. Manuf., Vol. 12, No. 4, pp. 671–678, 2011.
5. Belforte, G., Raparelli, T., Viktorov, V., and Trivella, A., “Permeability and Inertial Coefficients of Porous Media for Air Bearing Feefing System,” J. of Tribology, Vol. 129, pp. 705–711, 2007.
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