An Estimation Method (EM) of Generalized Displacement of Points of Interest (POIs) Using Critical Modes-Reference-Cited by-同舟云学术

An Estimation Method (EM) of Generalized Displacement of Points of Interest (POIs) Using Critical Modes

Published:2021-02-01 Issue:3 Volume:22 Page:395-408
ISSN:2234-7593
Container-title:International Journal of Precision Engineering and Manufacturing
language:en
Short-container-title:Int. J. Precis. Eng. Manuf.

Author:

Li Yujie,Zhu Yu,Zhang Ming^ORCID,Li Xin,Wang Leijie

Funder

National Natural Science Foundation of China

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

http://link.springer.com/content/pdf/10.1007/s12541-020-00377-x.pdf

Reference35 articles.

1. Schmidt, R. H. M. (2012). Ultra-precision engineering in lithographic exposure equipment for the semiconductor industry. Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences, 370(1973), 3950–3972. https://doi.org/10.1098/rsta.2011.0054.

2. Dorosti, M., Fey, R., Heertjes, M., van de Wal, M., & Nijmeijer, H. (2014). Finite element model reduction and model updating of structures for control. IFAC Proceedings Volumes, 47(3), 4517–4522. https://doi.org/10.3182/20140824-6-ZA-1003.01644.

3. Beerens, R. A. C. M., Jeunink, A. B., Van De Wal, M. M. J., Aangenent, W. H. T. M., Van Lieshout, R. H. A., Van De Groes, H. M. J., & Van Der Hoeven, S. W. (2016). U.S. Patent No. 9383659. Washington, DC: U.S. Patent and Trademark Office. http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO1&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&s1=9,383,659.PN.&OS=PN/9,383,659&RS=PN/9,383,659.

4. Seung, J., Yoo, S., & Chong, K. (2019). Experiments on state and unmeasured-parameter estimation of two degree-of-freedom system for precise control based on JAUKF. International Journal of Precision Engineering and Manufacturing, 20, 1159–1168. https://doi.org/10.1007/s12541-019-00137-6.

5. Chung, C., Tran, M., & Liu, M. (2020). Estimation of process damping coefficient using dynamic cutting force model. International Journal of Precision Engineering and Manufacturing, 21, 623–632. https://doi.org/10.1007/s12541-019-00297-5.