Author:
Vettiger P.,Cross G.,Despont M.,Drechsler U.,Dürig U.,Häberle W.,Lutwyche M. I.,Rothuizen H. E.,Stutz R.,Widmer R.,Binnig G. K.
Publisher
Springer Berlin Heidelberg
Cited by
2 articles.
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1. Microactuators;MEMS: A Practical Guide to Design, Analysis, and Applications;2006
2. Single crystal silicon piezoresistive nano-wire bridge;Sensors and Actuators A: Physical;2003-11