Thermal and Gas-Sensing Properties of a Micromachined Thermal Conductivity Sensor

Author:

Simon Isolde,Arndt Michael

Publisher

Springer Berlin Heidelberg

Reference9 articles.

1. H.A. Daynes, “Gas analysis by measurement of thermal conductivity”, Cambridge at the university press, 1933.

2. G. Wiegleb, “Industrielle Gasanalyse”, Technisches Messen, 62, 352–355, 1995.

3. H. Purneil, “Gas Chromatography”, Wiley, 276–294, 1962.

4. G. Pollak-Diener, E. Obermeier, “Heat-conduction microsensor based on silicon technology for the analysis of two-and three-component gas mixtures”, Sensors and Actuators B, 13–14, 345–347, 1993.

5. M. Arndt, I. Simon, “Hydrogen Sensor for Applications in Fuel Cell Vehicles”, accepted for publication in Proceedings of Sensor 2001.

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors;Sensors and Actuators A: Physical;2002-08

2. Thermal Microsensor for the Detection of Side-Impacts in Vehicles;Advanced Microsystems for Automotive Applications Yearbook 2002;2002

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