A Micormachined Coriolis-Force-Based Mass Flowmeter for Direct Mass Flow and Fluid Density Measurement-Reference-Cited by-同舟云学术

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A Micormachined Coriolis-Force-Based Mass Flowmeter for Direct Mass Flow and Fluid Density Measurement

Published:2001 Issue: Volume: Page:1432-1435
ISSN:
Container-title:Transducers ’01 Eurosensors XV
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Author:

Zhang Yafan,Tadigadapa Srinivas,Najafi Nader

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-642-59497-7_338

Reference8 articles.

1. O. Tabata, H. Inagaki, and I. Igarashi, “Monolithic Pressure-Flow Sensor,” IEEE Electron Device Letter, vol. EDL-7, pp. 254–256, Aprial 1986.

2. E. Yoon and K. D. Wise, “A Dielectrically-Supported Multi-Element Mass Flow Sensor,” IEEE IEDM Tech. Digest, pp. 670–673, Dec. 1988.

3. B. W. van Oudheusden, “Silicon Thermal Flow Sensors,” Sensors and Actuator A, 30 (1992) 5–26.

4. S. T. Cho, K. Najafi, C. E. Lowman, and K. D. Wise, “An Ultrasensitive Silicon Pressure-Based Microflow Senor,” IEEE Electron Devices, vol. 39, no. 4, pp. 825–835, April 1992.

5. Micro Motion Inc. Catalog.

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