A Novel Optical Scanner with Integrated Two-Dimensional Magnetostrictive Actuation and Two-Dimensional Piezoresistive Detection

Author:

Bourouina Tarik,Lebrasseur Eric,Reyne Gilbert,Fujita Hiroyuki,Masuzawa Takahisa,Ludwig Alfred,Quandt Eckhard,Muro Hideo,Oki Takahiko,Asaoka Akira

Publisher

Springer Berlin Heidelberg

Reference9 articles.

1. A. Garnier, T. Bourouina, E. Orsier, T. Masuzawa, H. Fujita, T. Hiramoto, J.C. Peuzin, ‘A fast robust and simple 2-D Micro-optical Scanner based on contactless magnetostrictive actuation’. MEMS’2000, Miyazaki, Japan. (2000) 715–720.

2. T. Bourouina, A. Garnier, H. Fujita, J-C. Peuzin, T. Masuzawa ‘Magnetically-induced frequency shift in a magneto-mechanical bimorph resonator’. SPIE Vol. 4175 Santa-Clara, USA, Sept. 18–19 (2000) 180–191.

3. E. Quandt, A. Ludwig ‘Giant Magnetostrictive multilayers’, J. Appl. Phys. (85) 8 (1999) 6232–6237.

4. E. Quandt, A. Ludwig J. Betz, K. Mackay, D. Givord ‘Giant Magnetostrictive spring magnet type multilayers’, J. Appl. Phys. (81) 8, (1997) 5420–5422.

5. RA. Conant, P.M. Hagelin, U. Krishnamoorthy, O. Slogaard, K.Y. Lau, R.S. Muller, ‘A raster-scanning full-motion video display using polysilicon micromachined mirors’ Transducers’99, Sendai, Japan, (1999) 376–379.

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Microactuators;MEMS: A Practical Guide to Design, Analysis, and Applications;2006

2. Electromagnetic actuation for MOEMS, examples, advantages and drawbacks of MAGMAS;Journal of Magnetism and Magnetic Materials;2002-04

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