Performance Analytical Model for Interbay Material Handling System with Shortcut and Blocking
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Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-642-25661-5_23
Reference14 articles.
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5. Wang, M.J., Chung, H.C., Wu, H.C.: The evaluation of manual FOUP handling in 300mm wafer fab. IEEE Transactions on Semiconductor Manufacturing 16, 44–55 (2003)
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