1. H.G. Tompkins, E.A. Irene, Handbook of Ellipsometry (William Andrew, Norwich, 2005)
2. R.M.A. Azzam, N.B. Bashara, Ellipsometry and Polarized Light. (North-Holland, Amsterdam, 1987). Paperback edn.
3. H.G. Tompkins, A User’s Guide to Ellipsometry (Academic Press, San Diego, 1993)
4. A. Röseler, Infrared Spectroscopic Ellipsometry (Akademie-Verlag, Berlin, 1990)
5. U. Rossow, W. Richter, in Optical Characterization of Epitaxial Semiconductor Layers, ed. by G. Bauer, W. Richter (Springer, Berlin, 1996), pp. 68–128