1. M.T. Bohr: Tech. Digest IEEE Int. Electron. Devices Meeting, 241 (1995)
2. D.C. Edelstein, G.A. Sai-Halasz, Y.-J. Mii: IBM J. Res. Develop., 39, 383 (1995)
3. . Handbook of Multilevel Metallization for Integrated Circuitsed. by S.R. Wilson, C.J. Tracy (Noyes Publications, Park Ridge, NJ 1993)
4. J.G. Ryan, R.M. Geffken, N.R. Poulin, J.R. Paraszczak:IBM J. Res. Develop., 39, 371 (1995)
5. M.T. Bohr: InAdvanced Metallization and Interconnect Systems for ULSI Applications in 1996ed. by R. Havemann, J. Schmitz, H. Komiyama, K. Tsubouchi (Materials Research Society, Boston, 1996) p. 3