Micro Temperature Sensors and Their Applications to MEMS Thermal Sensors

Author:

Kimura Mitusteru

Publisher

Springer Berlin Heidelberg

Reference16 articles.

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2. Kimura, M.: Heater, JP. Application No. 1979-027559 (JP No. 1398241)

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5. Kimura, M., Toshima, K.: Thermistor-like pn junction temperature-sensor with variable sensitivity and its combination with a micro-air-bridge heater. Sensors and Actuators A 108, 239–243 (2003)

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