Data Collection of Chemicals Used in Microelectronic Manufacturing Processes for Environmental Studies

Author:

Baudry Ingwild,Lelah Alan,Brissaud Daniel

Publisher

Springer Berlin Heidelberg

Reference17 articles.

1. Directive 2009/125/EC of the European Parliament and of the Council of establishing a framework for the setting of ecodesign requirements for energy-related products (October 21, 2009)

2. European Commission, DG Research, Unit “Nano- and Converging Science and Technologies”, published jointly with the Woodraw Wilson International Center for Scholars (March 20, 2007)

3. ISO 14040: Environmental management – Life cycle assessment – Principles and framework, International Organisation for Standardisation (ISO) (2006)

4. ISO 14044: Environmental management – Life cycle assessment – Requirements and guidelines, International Organisation for Standardisation (ISO) (2006)

5. Moore, G.E.: Cramming more components onto integrated circuits. Electronics 38(8) (1965)

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