1. The National Technology Roadmap for Semiconductors, (Sematech, 1997).
2. H. Nakata, K. Nishioka, and H. Abe, J. Vac. Sci. Technol. 17(6), 1351–11357 (1980).
3. Y. Suzuki, T. Yamazaki, and H. Nakata, J. Vac. Sci. Technol. B 21(9), 1328–1332 (1982).
4. R.A. Usmanov and V.A. Khamaev, Russ J. Phys. Chem. 52, 1717 (1978).
5. H.M. Naguib, R.A. Bond, and H.J. Poley, Presented at 1st Canadian Semiconductor Technology Conference, Ottawa (1982).