Examination of High Precision Slow-motion Feed-drive Systems for the Sub-micrometre Range

Author:

Weck M.,Bispink T.

Publisher

Springer Berlin Heidelberg

Reference14 articles.

1. Weck, M.; Hartel, R.; Bispink, T.: Limits of Workpiece Accuracy Caused by the Geometrical and Dynamical Behaviour of Ultraprecision Diamond Turning Machines. Conference “Ultraprecision in Manufacturing Engineering”, Aachen, May 1988, Proceedings “Ultraprecision in Manufacturing Engineering”, Springer-Verlag, Berlin, Heidelberg, New York, 1988, ISBN 3-540-19241-7.

2. Weck, M.; Hartel, R.: Bispink, T.: The Geometrical and Dynamical Behaviour of Ultraprecision Diamond Turning Machines set Limits to the Workpiece-Accuracy. SPIE-Conference, Session “Micromachining Optical Components and Precision Engineering”, Hamburg, 1988, SPIE Volume 1015.

3. HP 5527 A Laser Position Transducer System — Complete, High Performance Motion Control, Now With Fast, Programmable Servo Tuning. Company-brochure of Hewlett Packard, Santa Clara/USA, March 1988.

4. Weck, M.; Hartel, R.; Bispink, T.: Improving the Workpiece Quality in Precision Engineering — a Challenge for the Development of New Contol Systems. International Conference on Advanced Mechatronics, The Japan Society of Mechanical Engineers, Tokyo, May 1989.

5. Bryan, J.B. et al.: A Simple Method for Testing Measuring Machines and Machine Tools, Part 1: Principle and Applications. Precision Engineering, 4, 2, Butterworth, London, April 1982.

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