Phase Shifting Interferometry

Author:

de Groot Peter

Publisher

Springer Berlin Heidelberg

Reference34 articles.

1. Bruning, J.H., Herriott, D.R., Gallagher, J.E., Rosenfeld, D.P., White, A.D., Brangaccio, D.J.: Digital wavefront measuring interferometer for testing optical surfaces and lenses. Appl. Opt. 13, 2693–2703 (1974)

2. Brophy, C.: Effect of intensity error correlation on the computed phase of phase-shifting interferometry. J. Opt. Soc. Am.  A 7, 537–541 (1990)

3. Chakmakjian, S., Biegen, J., de Groot, P.: Simultaneous focus and coherence scanning in interference microscopy. In: Technical Digest, International Workshop on Interferometry, pp. 171–173 (1996)

4. Creath, K.: Phase-measuring interferometry techniques. In: Wolf, E. (ed.) Progress in optics, vol. XXVI, pp. 349–393. Elsevier Science Publishers, Amsterdam (1988)

5. Deck, L.L.: Suppressing phase errors from vibration in phase-shifting interferometry. Appl. Opt. 48, 3948–3960 (2009)

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