1. For a review see,e. g.: J. Bloem and L.J. tiling in: Current Topics in Materials Science, E. Kaldis ed. (North-Holland, New York 1978) Vol. 1, p. 147–342
2. For a review see,e.g.: D. Bäuerle in: Laser Diagnostics and Photochemical Processing for Semiconductor Devices, R.M. Osgood and S.R.J. Brueck eds. ( North Holland, New York 1983 )
3. For a review see,e.g.: D. J. Ehrlich, R.M. Osgood and T.F. D.utsch, J. Vac. Sci. Technol 21, 23 (1982)
4. G. Leyendecker, H. Noll, D. Bäuerle, P. Geittner and H. Lydtin, J. Electrochem. Soc. 130, 157 (1983)
5. Y. Rytz-Froidevaux, R.P. Salathe, H.H. Gilgen and H.P. Weber, Appl. Phys.’A 27, 133 (1982)