Real-Time Analysis of Initial Oxidation Process on Si(001) by Means of Surface Differential Reflectance Spectroscopy and Reflectance Difference Spectroscopy-Reference-Cited by-同舟云学术

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Real-Time Analysis of Initial Oxidation Process on Si(001) by Means of Surface Differential Reflectance Spectroscopy and Reflectance Difference Spectroscopy

Published:2013-12-05 Issue: Volume: Page:29-44
ISSN:0342-4111
Container-title:Springer Series in Optical Sciences
language:
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Author:

Ohno Shin-ya,Shudo Ken-ichi,Tanaka Masatoshi

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-642-40594-5_2

Reference46 articles.

1. D.E. Aspnes, J.P. Harbison, A.A. Studna, L.T. Florez, J. Vac. Sci. Technol. A 6, 1327 (1988)

2. N. Kobayashi, Y. Horikoshi, Jpn. J. Appl. Phys. 28, L1880 (1989)

3. J.F. McGilp, Prog. Surf. Sci. 49, 1 (1995)

4. P. Weightman, D.S. Marin, R.J. Cole, T. Farrell, Rep. Prog. Phys. 68, 1251 (2005)

5. C. Beitia, W. Preyss, R. Del Sole, Y. Borensztein, Phys. Rev. B 56, R4371 (1997)

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