Topography Measurements of High Gradient and Reflective Micro-structures by Digital Holography
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Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-642-36359-7_115
Reference8 articles.
1. Kozacki, T., Józwik, M., Jóźwicki, R.: Determination of optical field generated by a microlens using digital holographic method. Opto-Electronics Review 17, 58–63 (2009)
2. Colomb, T., Pavillon, N., Kühn, J., Cuche, E., Depeursinge, C., Emery, Y.: Extended depth-of-focus by digital holographic microscopy. Optics Letters 35, 1840–1842 (2010)
3. Kozacki, T., Liżewski, K., Kostencka, J.: Holographic method for topography measurement of highly tilted and high numerical aperture micro structures. Optics and Laser Technology 49, 38–46 (2013)
4. Kozacki, T., Józwik, M., Liżewski, K.: High-numerical-aperture microlens shape measurement with digital holographic microscopy. Optics Letters 36, 4419–4421 (2011)
5. Liżewski, K., Tomczewski, S., Kostencka, J., Kozacki, T.: Hybrid and transflective system based on digital holographic microscope and low coherent interferometer for high gradient shape measurement. In: Proc. of SPIE, vol. 8788, p. 87880A-87880A-7 (2013)
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1. Accurate DHM method for topography characterization of reflective microoptics;Advanced Mechatronics Solutions;2015-11-03
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