1. For recent surveys see, e.g., Laser Materials Processing —Industrial and Micrelectronics Applications, ed. by E. Beyer, SPIE Proc. 2207 (1994) Laser Assisted Fabrication of Thin Films and Microstructures, ed. by I. Boyd, SPIE Proc. 2045 (1994) Laser Processing in Manufacturing, ed. by R.C. Crafer, P.J. Oakley (Chapman & Hall, New York 1993) Laser Materials Processing, ed. by P. Denney, I. Miyamoto, B. Mordike (Laser Inst. Am., Orlando, FL 1994) S.M. Metev, V.P. Veiko: Laser-Assisted Microtechnology, Springer Ser. Mater. Sci., Vol.19 (Springer, Berlin, Heidelberg 1994) P.F. Barbara, W.H. Knox, G.A. Mourou, A.H. Zewail (eds.): Ultrafast Phenomena IX, Springer Ser. Chem. Phys., Vol.60 (Springer, Berlin, Heidelberg 1994)
2. W. Koechner: Solid-State Laser Engineering, 3rd edn., Springer Ser. Opt. Sci., Vol.1 (Springer, Berlin, Heidelberg 1992) Solid State Lasers and New Materials. SPIE Proc. 1839 (Washington 1992)
3. W. Witteman: CO 2 Lasers, Springer Ser. Opt. Sci., Vol.53 (Springer, Berlin, Heidelberg 1987)
4. Ch.K. Rhodes (ed.): Excimer Lasers, 2nd edn., Topics Appl. Phys., Vol.30 (Springer, Berlin, Heidelberg 1984)
5. M. von Allmen: In Laser Annealing of Semiconductors, ed. by J.M. Poate, J.W. Mayer (Academic, New York 1982) pp. 43–74