Author:
Pfleging Wilhelm,Kohler Robert,Südmeyer Isabelle,Rohde Magnus
Publisher
Springer Berlin Heidelberg
Reference166 articles.
1. C.G.K. Malek, Laser processing for bio-microfluidics applications (Part II). Anal. Bioanal. Chem. 385, 1362–1369 (2006)
2. W. Pfleging et al., Laser patterning and packaging of CCD-CE-Chips made of PMMA. Sens. Actuators B-Chem. 138, 336–343 (2009)
3. W. Pfleging, M. Przybylski, H.J. Bruckner, Excimer laser material processing—State of the art and new approaches in microsystem technology—Art. No. 61070G. Laser-based Micropackaging 6107(264), G1070–G1070 (2006)
4. W. Pfleging et al., (eds.), Laser -Based Micro- and Nanopackaging and Assembly IV. 2010. in SPIE
5. S. Fujii et al., Enlargement of crystal grains in thin silicon films by continuous-wave laser irradiation. Jpn. J. Appl. Phys. 46, 2501–2504 (2007)
Cited by
14 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献