1. Method of preparing electrostatic shutter mosaics, (1956), US Patent 2,749,598
2. Petersen K. E., (1982), “Silicon as a mechanical material,” Proceeding of the IEEE, 5: 420–457, May
3. Wolf S., and R. N. Tauber, Silicon Processing for the VLSI Era, Volume 1–3, Lattice Press
4. Chang C. Y. and S. M. Sze, (1996), “ULSI Technology,” McGraw-Hill Book Co
5. Kovacs G. T. A., N. I. Maluf, and K. E. Petersen, (1998) “Bulk Micromachining of Silicon,” Proc IEEE, 86(8): 1536–1551