Some results on chemical etching of AT-cut quartz wafers in ammonium bifluoride solutions-Reference-Cited by-同舟云学术

Some results on chemical etching of AT-cut quartz wafers in ammonium bifluoride solutions

Published:1982-05 Issue:5 Volume:17 Page:1348-1354
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Tellier C. R.

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00752244.pdf

Reference17 articles.

1. J. R. Vig, J. W. Lebus andR. L. Filler, Proceedings of the 31st Annual Symposium on Frequncy Control. Fort Monmouth, New Jersey, 1977 (Electronic Industries Association, Washington, DC, 1977) p. 131.

2. J. Appl. Phys. 35 (1964) 1362.

3. Y. Sekiguchi andH. Funakubo,J. Mater. Sci. 15 (1980) 3066.

4. H. Fukuyo andN. Oura, Proceedings of the 30th Annual Symposium on Frequency Control, Fort Monmouth, New Jersey, 1976 (Electronic Industries Association, Washington, D C, 1976) p. 254.

5. P. Maitre, Th�se de Doctorat Universit� de Besancon, France (1979).

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