Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering
Reference11 articles.
1. H. C. Pfeiffer,J. Vac. Sci, Technol.,15(1978)3, 887–890.
2. J. Trotel,J. Vac. Sci. Technol.,15(1978)3, 872–873.
3. E. Goto et al.,J. Vac. Sci. Technol. 15(1978)3, 883–886.
4. G. Cogswell et al., Electron Lithography System with Variable-Shaped Electron Beam, Proc. 8th International Conference on Electron and Ion Beam Science and Rechnology, Seatle, USA, 1978, 117–133.
5. N. Saitou et al.,J. Vac. Sci. Technol.,18(1981)4, 1087–1093.