Effects of electron beam lithography process parameters on structure of silicon optical waveguide based on SOI
Author:
Publisher
Springer Science and Business Media LLC
Subject
Metals and Alloys,General Engineering
Link
https://link.springer.com/content/pdf/10.1007/s11771-022-5152-0.pdf
Reference30 articles.
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4. JALALI B, FATHPOUR S. Silicon photonics [J]. Journal of Lightwave Technology, 2006, 24(12): 4600–4615. DOI: https://doi.org/10.1109/JLT.2006.885782.
5. GRILLOT F, VIVIEN L, LAVAL S, et al. Propagation loss in single-mode ultrasmall square silicon-on-insulator optical waveguides [J]. Journal of Lightwave Technology, 2006, 24(2): 891–896. DOI: https://doi.org/10.1109/JLT.2005.861939.
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