Development of XY scanner with minimized coupling motions for high-speed atomic force microscope-Reference-Cited by-同舟云学术

Development of XY scanner with minimized coupling motions for high-speed atomic force microscope

Published:2011-06 Issue:3 Volume:18 Page:697-703
ISSN:2095-2899
Container-title:Journal of Central South University
language:en
Short-container-title:J. Cent. South Univ. Technol.

Author:

Park Jong-kyu,Moon Won-kyu

Publisher

Springer Science and Business Media LLC

Subject

Metals and Alloys,General Engineering

Link

http://link.springer.com/content/pdf/10.1007/s11771-011-0750-2.pdf

Reference15 articles.

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3. GEORG S, PHILIOPP J T, PAUL K H. Design and input-shaping control of a novel scanner for high-speed atomic force microscopy[J]. Mechatronics, 2008, 18: 282–288.

4. GEORG E, GEORG S, JOHANNES H, TZVETAN I, KATARINA I, ROH P, NIELS H, JONATHAN A, PHILIPP T, IVO W, PAUL K. Components for high speed atomic force microscopy[J]. Ultramicroscopy, 2006, 106: 881–887.

5. KWON J, HONG J, KIM Y, LEE D, LEE K, LEE S, PARK S. Atomic force microscope with improved scan accuracy, scan speed, and optical vision[J]. Rev Sci Instrum, 2003, 74: 4378–4383.

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