Effects of ratio of hydrogen flow on microstructure of hydrogenated microcrystalline silicon films deposited by magnetron sputtering at 100 °C
Author:
Publisher
Springer Science and Business Media LLC
Subject
Metals and Alloys,General Engineering
Link
http://link.springer.com/content/pdf/10.1007/s11771-019-4203-7.pdf
Reference30 articles.
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5. PYTHON M, MADANI O, DOMINÉ D, MEILLAUD F, VALLAT-SAUVAIN E, BALLIF C. Influence of the substrate geometrical parameters on microcrystalline silicon growth for thin-film solar cells [J]. Sol Energ Mat Sol C, 2009, 93(10): 1714–1720. DOI: 10.1016/j.solmat.2009.05.025.
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