Author:
Choi Rak Jun,Hahn Yoon Bong,Shim Hyun-Wook,Suh Eun-Kyung,Hong Chang Hee,Lee Hyung Jae
Publisher
Springer Science and Business Media LLC
Subject
General Chemical Engineering,General Chemistry
Reference11 articles.
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3. Hahn, Y B., Choi, R. I, Hong, J. H., Park, H. J. and Lee, H. I, “High-Density Plasma-Induced Etch Damage of InGaN/GaN Multiple Quantum Well Light-Emitting Diodes,”J. Appl. Phys.,92, 1189 (2002).
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5. Im, Y. H., Choi, C. S. and Hahn, Y B., “High Density Plasma Etching of GaN Films in Cl/Ar Discharges with a Low-Frequency-Excited DC Bias,”J. Korean Physical Society,39(4), 617 (2001).
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