1. W.L. Brom, Nucl.Instrum. Methods, B 37/38,270(1989).
2. T. Venkatesan, L. Calcagno, B.S. Elman and G. Foti, in “Ion Beam Modification of Insulators”, P. Mazzoldi and G. Arnold, Editors, p.301, Elsevier, Amsterdam, 1987.
3. S. Tagawa, Proceedings of the 12th International Symposium on Ion-Assisted Technology (ISIAT), T. Takagi, Editor, p.475, Kyoto University Press, Tokyo, June 5–7 1989.
4. W.L. Brown, Radiation Effects, 90, 115 (1986).
5. S. Tagawa, N. Kouchi, Y. Aochi and H. Shibata; “Adv. in Resist Technology and Processing III”, SPIE Symp., 22, 631 (1986).