Robots as a Potential Source of Particulate Contamination-Reference-Cited by-同舟云学术

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Robots as a Potential Source of Particulate Contamination

Published:1990 Issue: Volume: Page:129-141
ISSN:
Container-title:Particles in Gases and Liquids 2
language:
Short-container-title:

Author:

May K.,Pfeifer T.,Schilling R. J.

Publisher

Springer US

Link

http://link.springer.com/content/pdf/10.1007/978-1-4899-3544-1_11

Reference15 articles.

1. R. Iscoff, Robots in the clean room, Semiconductor Intl., 50-57 (Nov. 1984).

2. A. Chestnut, P.H. Singer, and K. Kearney, Robotic systems enhance manufacturing efficiency, Semiconductor Intl., 58-62 (October 1988).

3. P. S. Burggraaf, Semiconductor factory automation: Current theories, Semiconductor Intl., 88-97 (October 1985).

4. P. H. Singer, Automating inter-equipment transport, Semiconductor Intl., 56-61 (March 1985).

5. J. Dooley, Automated processing equipment, Semiconductor Intl., 120 (Nov. 1986).

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