A Composite Adaptive Controller Design for 3-DOF MEMS Vibratory Gyroscopes Capable of Measuring Angular Velocity

Author:

Ranjbar EhsanORCID,Suratgar Amir Abolfazl

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Computer Networks and Communications,Computer Vision and Pattern Recognition,Energy Engineering and Power Technology,Signal Processing

Reference36 articles.

1. Acar C, Shkel A (2008) MEMS vibratory gyroscopes; structural approaches to improve robustness, 1st edn. Springer, Berlin

2. Alper SE, Akin T (2001) A symmetric surface micro-machined gyroscope with decoupled oscillation modes. In: Proceedings of the 11th international conference on solid-state sensors and actuators, Munich, Germany, pp 456–459

3. Bedendo A, Reimbold M, Sausen A (2014) Evaluation of model ARX for elastic masses MEMS using the indexes RMSE, AIC, and BIC. J Control Autom Electr Syst 25(2):195–205

4. Brogan WL (1991) Modern control theory, 3rd edn. Prentice Hall International, New York

5. Busurin VI, Zheglov MA, Korobkov VV, Fam AT (2017) Methods of expanding the measurement range of micro-opto-electro-mechanical angular velocity transducer. Meas Tech 60(6):558–564

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