Linear Thermal Expansion Coefficient (at Temperatures from 130 to 800 K) of Borosilicate Glasses Suitable for Silicon Compounds in Microelectronics

Author:

Sinev L. S.,Petrov I. D.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Mechanics of Materials,Ceramics and Composites

Reference7 articles.

1. S. I. Novikova, Thermal Expansion of Solids [in Russian], Nauka, Moscow (1974).

2. Certificate of Approval of the Type of Means of Measurement No. 50103–12, June 1, 2012: Analyzers of Thermomechanical Series EXSTAR TMA_SS 7000 Model TMA/SS 7100 and TMA/SS 7300 [in Russian], Federal Agency for Technical Regulation and Metrology, Moscow (2012).

3. N. S. Kravchenko and O. G. Revinskaya, Methods of Processing Measurements and Evaluation of Errors in Instructional Laboratory Practice [in Russian], Izd. Tomsk. Politekhn. Universiteta, Tomsk (2011).

4. H. Watanabe, N. Yamada, and M. Okaji, “Linear thermal expansion coefficient of silicon from 293 to 1000 K,” Int. J. Thermophysics, 25(1), 221 – 236 (2004).

5. LK5 glass type, in: Lytkarino Optical Glass Factory JSC: Company site. URL: http://lzos.ru/glass_pdf/LK5.pdf (query date March 1, 2015).

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