Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing

Author:

Musselman M.,Xie H.,Djurdjanovic D.ORCID

Funder

Division of Industrial Innovation and Partnerships

Publisher

Springer Science and Business Media LLC

Subject

Artificial Intelligence,Industrial and Manufacturing Engineering,Software

Reference38 articles.

1. Analog Devices. (2015). ADXL327 data sheet. http://www.analog.com/static/imported-files/data_sheets/ADXL327.pdf . Accessed 15 August 2015

2. Bao, J., & Spanos, C. J. (2001). A simulation framework for lithography process monitoring and control using scatterometry. In AEC/APC Symposium XIII, Abstract available via http://impact.berkeley.edu/archive/secure/archives/seminars/abstracts/Junwei100101.pdf . Accessed 15 August 2015

3. Cholettte, M., Celen, M., Djurdjanovic, D., & Rasberry, J. (2013). Condition monitoring and operational decision making in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 26(4), 454–464.

4. Coates, M., & Fitzgerald, W. (1999). Regionally optimised time–frequency distributions using finite mixture models. Signal Processing, 77(3), 247–260.

5. Cohen, L. (1995). Time–frequency analysis: Theory and applications (1st ed.). Englewood Cliffs: Prentice Hall.

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