Eco-friendly smart design strategy for integrated semiconductor processes
Author:
Publisher
Springer Science and Business Media LLC
Subject
Artificial Intelligence,Industrial and Manufacturing Engineering,Software
Link
https://link.springer.com/content/pdf/10.1007/s10845-023-02226-w.pdf
Reference37 articles.
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3. Chen, C. L., & Lin, C. Y. (2011). A flexible structural and operational design of steam systems. Applied Thermal Engineering, 31, 2084–2093. https://doi.org/10.1016/j.applthermaleng.2011.03.007
4. Chen, C. L., & Lin, C. Y. (2012). Design of entire energy system for chemical plants. Industrial & Engineering Chemistry Research, 51, 9980–9996. https://doi.org/10.1021/ie202716q
5. Chen, P. H. (2021). Intelligence everywhere: the challenges and opportunities for semiconductor designs. In 2021 international symposium on VLSI design, Automation and Test (VLSI-DAT), (pp. 1–2). https://doi.org/10.1109/VLSI-DAT52063.2021.9427341
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