Author:
Daves Walter,Krauss Andreas,Häublein Volker,Bauer Anton J.,Frey Lothar
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. E. Kohn, Comprehensive Microsystems, Vol. 1 (Oxford: Elsevier Science, 2008), pp. 131–173.
2. R. Cheung, Silicon Carbide Micro Electromechanical Systems for Harsh Environments (London: Imperial College Press, 2006), pp. 128–168.
3. G.F. Eriksen and K. Dyrbye, J. Micromech. Microeng. 6, 55 (1996).
4. M.T. Soo, K.Y. Cheong, and A.F.M. Noor, Sens. Actuators B 151, 39 (2010).
5. R.S. Okojie, D. Spry, J. Krotine, C. Salupo, and D.R. Wheeler, Mater. Res. Soc. Symp. Proc., Vol. 622 (2000), p. T8.3.1–6.
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