Impurities in hydride gases part 1: Investigation of trace moisture in the liquid and vapor phase of ultra-pure ammonia by FTIR spectroscopy-Reference-Cited by-同舟云学术

Impurities in hydride gases part 1: Investigation of trace moisture in the liquid and vapor phase of ultra-pure ammonia by FTIR spectroscopy

Published:2001-11 Issue:11 Volume:30 Page:1438-1447
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Funke Hans H.,Raynor Mark W.,Yücelen Belgin,Houlding Virginia H.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-001-0199-4.pdf

Reference31 articles.

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5. J. Wei, J. Pillion, and C. Hoang, J. Inst. Enviro. Sci. 41, 43 (1997).

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