Author:
Chen Chih-Hao,Lee Boon-Ho,Chen Hsiang-Chua,Wang Chang-Meng,Wu Albert T.
Funder
Ministry of Science and Technology, Taiwan
SHENMAO Technology Inc., Taiwan
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. C.T. Pan, H. Yang, S.C. Shen, M.C. Chou, and H.P. Chou, J. Micromech. Microeng. 12, 611 (2002).
2. F. Niklaus, P. Enoksson, E. Kalvesten, and G. Stemme, J. Micromech. Microeng. 11, 100 (2001).
3. M. Amagai, Microelectron. Reliab. 39, 1365 (1999).
4. Y. Kim, S.K. Kang, S.D. Kim, and S.E. Kim, Microelectron. Eng. 89, 46 (2012).
5. A.T. Wu, C.Y. Tsai, C.L. Kao, M.K. Shih, Y.S. Lai, H.Y. Lee, and C.S. Ku, J. Electron. Mater. 38, 11 (2009).
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