On the suitability of getter-purified hydrogen for the LP-MOVPE of (AlGa)As: A comparison to Pd-diffused hydrogen-Reference-Cited by-同舟云学术

On the suitability of getter-purified hydrogen for the LP-MOVPE of (AlGa)As: A comparison to Pd-diffused hydrogen

Published:2001-11 Issue:11 Volume:30 Page:1397-1401
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Hardtdegen H.,Schmidt r.,Wirtz K.,Mueck A.,Guadagnuolo S.,Vergani G.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-001-0190-0.pdf

Reference17 articles.

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3. P. Giannoules, C. Solcia, and M. Succi, Semiconductor Fabtech (1992), p. 153.

4. H. Hardtdegen, Proc. 24th State-of-the-Art-Program on Compound Semiconductors (SOTAPOCS), ed. F. Ren, S.J. Pearton, S.N.G. Chu, R.J. Shul, W. Pletschen, and T. Kamijoh (Pennington, NJ: Electrochem. Soc., 1996) p. 49.

5. M. Hollfelder, H. Hardtdegen, R. Meyer, R. Carius, and H. Lüth, J. Electron. Mater. 23, 1061 (1994).

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