A Fractal Analysis of the Nucleation Transition in Annealed La2O3 Thin Films-Reference-Cited by-同舟云学术

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A Fractal Analysis of the Nucleation Transition in Annealed La2O3 Thin Films

Published:2018-06-12 Issue:9 Volume:47 Page:5352-5358
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Yang Chen,Liu Guodong,Yan Lirong

Funder

The Scientific Research Programs Funded by Shaaxi Provincial Education Department

The Open Fund of Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/article/10.1007/s11664-018-6423-2/fulltext.html

Reference21 articles.

1. J. Chen, T. Kawanage, H. Wakabayashi, K. Tsutsui, H. Iwai, D. Nohat, H. Nohira, and K. Kakushima, Microelectron. Reliab. 16, 60 (2016).

2. T. Yu, C.G. Jin, Y.J. Dong, D. Cao, L.J. Zhu, and X.M. Wu, Mater. Sci. Semicon. Proc. 1321, 16 (2013).

3. P. Esakky and J.B. Kailath, Appl. Sur. Sci. 66, 413 (2017).

4. D.A. Grave, J.A. Robinson, and D.E. Wolfe, Thin Solid Films 194, 589 (2015).

5. K. Kato, M. Sakashita, W. Takeuchi, N. Taoka, O. Nakasuka, and S. Zaima, Solid State Electron. 56, 83 (2013).

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