Electrical properties of carbon nitride thin films: Role of morphology and hydrogen content-Reference-Cited by-同舟云学术

Electrical properties of carbon nitride thin films: Role of morphology and hydrogen content

Published:2002-09 Issue:9 Volume:31 Page:L11-L15
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Broitman E.,Hellgren N.,Neidhardt J.,Brunell I.,Hultman L.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-002-0190-8.pdf

Reference27 articles.

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2. CNX films are being used by the computer magnetic industry as a protective overcoat (for example, Seagate Technology, Hyundai Electronics America, IBM, and Western Digital in the United States) and as a protective coating in special tools (for example, Impact Coatings AB in Sweden)

3. See for example, US04664976, US05630275, US05855746, US6165891, JP11050988A2, JP2040059A2, and EP1002964A1 (copies of the patents can be obtained from http://www.delphion.com).

4. Z.J. Zhang, S. Fan, J. Huang, and C.M. Lieber, Appl. Phys. Lett. 68, 2639 (1996).

5. D.R. McKenzie, Y. Yim, N.A. Marks, C.A. Davis, B.A. Pailthorpe, G. Amaratunga, and V.S. Veerasamy, Diam. Relat. Mater. 3, 353 (1994).

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