Phase-Spectral Ellipsometry Method for Nondestructive Control of the Chemical Composition of thin Metal-Oxide Heterostructures-Reference-Cited by-同舟云学术

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Phase-Spectral Ellipsometry Method for Nondestructive Control of the Chemical Composition of thin Metal-Oxide Heterostructures

Published:2022-11 Issue:8 Volume:65 Page:608-613
ISSN:0543-1972
Container-title:Measurement Techniques
language:en
Short-container-title:Meas Tech

Author:

Tyurin D. N.,Kotenev V. A.

Publisher

Springer Science and Business Media LLC

Subject

Applied Mathematics,Instrumentation,General Engineering,Engineering (miscellaneous)

Link

https://link.springer.com/content/pdf/10.1007/s11018-023-02128-6.pdf

Reference18 articles.

1. P. Mele, T. Endo, S. Arisawa, C. Li, and T. Tsuchiya, Oxide Thin Films, Multilayer, and Nanocomposites, Springer Int. Publ., Switzerland (2015), https://doi.org/10.1007/978-3-319-14478-8.

2. M. Losurdo, Ellipsometry at the Nanoscale, ed. by M. Losurdo and K. Hingerl, Springer, Berlin, Heidelberg (2013), https://doi.org/10.1007/978-3-642-33956-1.

3. R. M. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, North Holland; 3rd reprint (1999).

4. V. A. Kotenev, Proc. SPIE Analyt. Methods. Opt. Tomogr., 1843 (1992), https://doi.org/10.1117/12.131899.

5. D. N. Tyurin, V. A. Kotenev, and A. Yu. Tsivadze, Meas. Tech., 62, No. 11, 996–1002 (2020), https://doi.org/10.1007/s11018-020-01724-0.

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