Quartz Resonators for Monitoring Thin-Film Mass and Thickness-Reference-Cited by-同舟云学术

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Quartz Resonators for Monitoring Thin-Film Mass and Thickness

Published:2005-02 Issue:2 Volume:48 Page:146-150
ISSN:0543-1972
Container-title:Measurement Techniques
language:en
Short-container-title:Meas Tech

Author:

Gribova L. K.,Savchenko V. E.,Sorokin A. V.

Publisher

Springer Science and Business Media LLC

Subject

Applied Mathematics,Instrumentation

Link

http://link.springer.com/content/pdf/10.1007/s11018-005-0113-1.pdf

Reference9 articles.

1. A. I. Belyaeva et al., Prib. Tekh. Eksper., No. 4, 239 (1993).

2. A. I. Chursin, Elektron. Tekh., Ser. 5, No. 2, 100 (1974).

3. V. E. Savchenko, Inzh.-Fiz. Zh., No. 6, 784 (1982).

4. W. Cady, Piezoelectricity and Its Practical Application [Russian translation], IIL, Moscow (1949).

5. V. E. Savchenko and L. K. Gribova, Izmer. Tekh., No. 6, 49 (2002).

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A Method for the Measurement of Thickness of Inorganic Solid Films by Medium Energy Electron Excited X-ray Fluorescence;IOP Conference Series: Materials Science and Engineering;2020-03-01

2. Effects of step slope on thickness measurement by optical interferometry for opaque thin films;Thin Solid Films;2008-02

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