1. Popov, O.A., Physics of Thin Films, Francombe, M. and Vossen, J., Eds., San Diego, Calif.: Academic, pp. 121–233.
2. Asmussen, J., Grotjohn, T.A., Mak, P.U., and Perrin, M.A., IEEE Trans. Plasma Sci., 1997, vol. 25, pp.1196–1221.
3. Lieberman, M.A. and Lichtenberg, A.J., Principles of Plasma Discharges and Material Processing, New York: Wiley, 1994.
4. Chen, F.F., Introduction to Plasma Physics and Controlled Fusion, vol. 1: Plasma Physics, New York: Plenum, 1984.
5. Lieberman, M.A. and Lichtenberg, A.J., Principles of Plasma Discharges and Material Processing, New York: Wiley, 1994.