Copper BEOL Interconnects for Silicon CMOS Logic Technology-Reference-Cited by-同舟云学术

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Copper BEOL Interconnects for Silicon CMOS Logic Technology

Published:2003 Issue: Volume: Page:35-65
ISSN:
Container-title:Interconnect Technology and Design for Gigascale Integration
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Author:

Nitta Satya V.,Purushothaman Sampath,Ryan James G.,Edelstein Daniel C.,Andricacos Panayotis,Hu Chao-Kun,Shaw Thomas M.,Rosenberg Robert,Lloyd James R.

Publisher

Springer US

Link

http://link.springer.com/content/pdf/10.1007/978-1-4615-0461-0_2.pdf

Reference60 articles.

1. 1999 National Technology Roadmap for Semiconductors, Semiconductor Research Corporation and International Sematech.

2. D. Edelstein et. al., Tech. Digest IEEE IEDM, p773 (1997)

3. C. W. Kaanta et. al.,Proc. 10th International VMIC, 1993, pp 15–21.

4. J. G. Ryan et. al., IBM J. Res. Dev., 39, 4, p371 (1995)

5. R. Rosenberg et. al., Annu. Rev. Mater. Sci., 30, p229 (2000)

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