Stress-Depth Profiles in Magnetron Sputtered Mo Films Using Grazing Incidence X-ray Diffraction (Gixd)-Reference-Cited by-同舟云学术

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Stress-Depth Profiles in Magnetron Sputtered Mo Films Using Grazing Incidence X-ray Diffraction (Gixd)

Published:1994 Issue: Volume: Page:189-196
ISSN:
Container-title:Advances in X-Ray Analysis
language:
Short-container-title:

Author:

Ballard B. L.,Predecki P. K.,Braski D. N.

Publisher

Springer US

Link

http://link.springer.com/content/pdf/10.1007/978-1-4615-2528-8_25.pdf

Reference27 articles.

1. Windischman, H., Critical Reviews in Solid State and Mat. Sci., 17 (6), 547, 1992.

2. Thornton, J. A. and Hoffman, D. W., J. Vac. Sci. Technol., 164,1 977.

3. Thornton, J. A., Tabock, J., and Hoffman, D. W., Thin Solid Films64 111 1979.

4. Hoffman, D. W., and Thornton, J. A., J.Vac.Sci. Technol.16134,1977.

5. Hoffman, D. W., and Thornton, J. A., J.Vac.Sci. Technol.17,380,1980.

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