Setting Up a 3D TCAD Simulation-Reference-Cited by-同舟云学术

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Setting Up a 3D TCAD Simulation

Published:2011-07-26 Issue: Volume: Page:81-104
ISSN:
Container-title:3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics
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Author:

Li Simon,Fu Yue

Publisher

Springer New York

Link

http://link.springer.com/content/pdf/10.1007/978-1-4614-0481-1_4.pdf

Reference11 articles.

1. Crosslight Software. 2009. CSuprem Manual. Burnaby,BC,Canada

2. Crosslight. Crosslight.com. [Online] www.crosslight.com .

3. GDSII. Wikipedia. [Online] http://en.wikipedia.org/wiki/GDSII .

4. James D.Plummer, Michael D.Deal, Peter B.Griffin. Silicon VLSI Technology, Fundamentals,Practice and Modeling. s.l. : Prentice Hall, 2000. 0-13-085037-3.

5. Photoresist. Wikipedia. [Online] [Cited: March 25, 2011.] http://en.wikipedia.org/wiki/Photoresist.

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1. Compact 200V Diode Constructed on Thick SOI Wafer;2023 35th International Symposium on Power Semiconductor Devices and ICs (ISPSD);2023-05-28

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