Process Integration Issues for Poly-Si TFT Fabrication

Author:

Higashi Seiichiro

Publisher

Springer US

Reference46 articles.

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2. S. Inoue, H. Kawai, S. Kanbe, T. Saeki, and T. Shimoda, “Active-Matrix Electrophoretic Display,” Dig. Tech. Pap. Active-Matrix Liquid-Crystal Displays, Tokyo, 9, 2001.

3. N. D. Young, G. Harkin, R. M. Bunn, D. J. McCulloch R. W. Wilks, and A. G. Knapp, “Novel Fingerprint Scanning Arrays Using Polysilicon TFT’s on Glass and Polymer Substrate,” IEEE Electron Device Lett., 18, 19 (1997).

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